Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide
Device isolation is one of the most important technology features towards the realization of very large scale CMOS device integration. Since the early days of semiconductor industry, LOCOS isolation has been the major isolation scheme. However, one of it is major drawback is the oxide encroachment,...
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Universiti Malaysia Perlis
2008
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my.unimap-19312008-10-16T03:50:21Z Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide Hafizal Hafiz Sarjoni Zaliman Sauli, P.M. (Advisor) CMOS device Conventional Local Oxidation (LOCOS) Metal oxide semiconductors, Complementary Silicon dioxide Semiconductor engineering Pad oxide Device isolation is one of the most important technology features towards the realization of very large scale CMOS device integration. Since the early days of semiconductor industry, LOCOS isolation has been the major isolation scheme. However, one of it is major drawback is the oxide encroachment, or so called, bird’s beak beneath under active areas which limits its application in deep sub-micron CMOS technology. This project investigates the use of modified LOCOS structures for example Poly Buffered LOCOS (PBL) and Fully Recessed LOCOS as a bird’s beak suppressing technique. It was found that, Poly Buffered LOCOS and Fully Recessed LOCOS structures, have been dramatically reduce the oxide encroachment beneath the active areas. 2008-09-03T08:24:22Z 2008-09-03T08:24:22Z 2007-03 Learning Object http://hdl.handle.net/123456789/1931 en Universiti Malaysia Perlis School of Microelectronic Engineering |
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Universiti Malaysia Perlis |
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UniMAP Library |
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Asia |
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Malaysia |
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Universiti Malaysia Perlis |
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| language |
English |
| topic |
CMOS device Conventional Local Oxidation (LOCOS) Metal oxide semiconductors, Complementary Silicon dioxide Semiconductor engineering Pad oxide |
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CMOS device Conventional Local Oxidation (LOCOS) Metal oxide semiconductors, Complementary Silicon dioxide Semiconductor engineering Pad oxide Hafizal Hafiz Sarjoni Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide |
| description |
Device isolation is one of the most important technology features towards the realization of very large scale CMOS device integration. Since the early days of semiconductor industry, LOCOS isolation has been the major isolation scheme. However, one of it is major drawback is the oxide encroachment, or so called, bird’s beak beneath under active areas which limits its application in deep sub-micron CMOS technology. This project investigates the use of modified LOCOS structures for example Poly Buffered LOCOS (PBL) and Fully Recessed LOCOS as a bird’s beak suppressing technique. It was found that, Poly Buffered LOCOS and Fully Recessed LOCOS structures, have been dramatically reduce the oxide encroachment beneath the active areas. |
| author2 |
Zaliman Sauli, P.M. (Advisor) |
| author_facet |
Zaliman Sauli, P.M. (Advisor) Hafizal Hafiz Sarjoni |
| format |
Learning Object |
| author |
Hafizal Hafiz Sarjoni |
| author_sort |
Hafizal Hafiz Sarjoni |
| title |
Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide |
| title_short |
Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide |
| title_full |
Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide |
| title_fullStr |
Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide |
| title_full_unstemmed |
Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide |
| title_sort |
study the effect of bird’s beak on fully recessed locos and poly buffered locos using 2 different pad oxide |
| publisher |
Universiti Malaysia Perlis |
| publishDate |
2008 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/1931 |
| _version_ |
1643787490469871616 |
| score |
13.250246 |