封面图片

Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study

In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-,...

Saved in:

书目详细资料
Main Authors:	Narayanamurthy, Vigneswaran, Lakshminarayanan, Sujatha, Yacin, S. Mohamed, Fahmi, Samsuri
格式:	Article
语言:	English
出版:	World Scientific Publishing Co Pte Ltd 2017
主题:	TK Electrical engineering. Electronics Nuclear engineering
在线阅读:	http://umpir.ump.edu.my/id/eprint/16921/1/fkee-2017-Vigneswaran-Design%20optimization1.pdf http://umpir.ump.edu.my/id/eprint/16921/ http://dx.doi.org/10.1142/S0218126617500955
标签:	添加标签没有标签, 成为第一个标记此记录!

相似书籍

A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
由: Md Khir, Mohd Haris, et al.
出版: (2010)

Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer
由: L., Sujatha, et al.
出版: (2016)

A low-cost CMOS-MEMS Piezoresistive Accelerometer With Large Proof Mass
由: Md Khir, Mohd Haris, et al.
出版: (2011)

Design and modeling of silicon MEMS accelerometer
由: Hrairi, Meftah, et al.
出版: (2011)

Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
由: Yusof, Norliana, et al.
出版: (2021)

Design and optimization of mems accelerometer sensor for lower limb exoskeleton application / Muhammad Fareq Ibrahim
由: Muhammad Fareq , Ibrahim
出版: (2018)

Simulation study of convex corner undercutting in KOH and TMAH for a MEMS piezoresistive accelerometer
由: Yusof, N., et al.
出版: (2016)

Corner compensation mask design on (MEMS) accelerometer structure
由: Norliana, Yusof, et al.
出版: (2014)

Design and modelling of silicon MEMS accelerometer
由: Hrairi, Meftah, et al.
出版: (2013)

Perspectives of a Farmer Digital Expert Assistant System
由: Vigneswaran, Narayanamurthy, et al.
出版: (2016)

ECG noise reduction with the use of the ant lion optimizer algorithm
由: Kiew, Hui Hii, et al.
出版: (2019)

Design and simulation of MEMS thermal actuator
由: Ismail, Mohd Hafiz, et al.
出版: (2024)

Tilt based passive optimizations for microfluidics and lab-on-chip devices - A simulation study
由: Jeroish, Z. E., et al.
出版: (2020)

ECG noise reduction technique using Antlion Optimizer (ALO) for heart rate monitoring devices
由: Hii, Kiew Hui, et al.
出版: (2019)

Simulation study of convex corner undercutting in KOH and TMAH for a MEMS piezoresistive accelerometer
由: Norliana, Yusof, et al.
出版: (2016)

MEMS actuators for biomedical applications: a review
由: Mohd. Ghazali, Farah Afiqa, et al.
出版: (2020)

Corner compensation mask design on (MEMS) accelerometer structure
由: Che Wan Noorakma, Abdullah, et al.
出版: (2014)

Digital expert system for smart aquaculture farming
由: N. S., Shamsuddin, et al.
出版: (2019)

Design, optimization, fabrication and analysis of Cu microheater for loop-mediated isothermal amplification (LAMP) applications
由: Ezhilnavaroji, Jeroish Zachariah, et al.
出版: (2023)

Classification on MEMS accelerometer and device application
由: Chin, Yong Huan, et al.
出版: (2014)

Performance analysis of PDMS polymer as a MEMS FPOTF actuator
由: Mohammad, Abu Bakar, et al.
出版: (2008)

Farmer digital expert assistance systems
由: Samsuri, Fahmi B., et al.
出版: (2016)

3D extracellular morphology features from rapid photo-polymerized cell replica
由: Vigneswaran, Narayanamurthy, et al.
出版: (2018)

Fabrication and characterization of microstacked PZT actuator for MEMS applications
由: Sabri, M.F.M., et al.
出版: (2015)

A Novel Photoplethysmograph Sensor Probe Design For Motion Artifact Detection: A Comparison Study With Three Axis Accelerometer
由: Muhideen Abbas, Hasan, et al.
出版: (2016)

MEMS piezoresistive accelerometer sensor for gait analysis
由: Siti Nurdiyana, Abd. Rashid
出版: (2017)

Effect of accelerometer mass on thin plate vibration
由: Baharin, Nor Hatini
出版: (2008)

Effect of accelerometer mass on thin plate vibration
由: Baharin, Nor Hatini, et al.
出版: (2009)

Modeling of electrostatic actuated mems cantilever beam for application as optical switch
由: Leow, Cheah Wei
出版: (2002)

Simulation and characterization of MEMS piezoelectric thermal actuator
由: Palianysamy, Moganraj, et al.
出版: (2013)

Bluetooth Accelerometer Mouse
由: Shanthini S. Selvaraja, Shanthini
出版: (2010)

Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
由: Mohamed Ali, Mohamed Sultan, et al.
出版: (2014)

Control of Undesirable Modal Vibrations of a MEMS-Based Microcantilever with Piezoelectric Actuator
由: ZULKARNAIN, NUR F ATIN
出版: (2011)

Design and optimization of a MEMS quartz mass sensor array for biosensing
由: Zainuddin, Ahmad Anwar, et al.
出版: (2018)

DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
由: AHMED ALMAHI, ABDELAZIZ YOUSIF
出版: (2015)

DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR
由: AHMED ALMAHI, ABDELAZIZ YOUSIF
出版: (2016)

A new carbon nanoparticle-polymer composite for cell imprint lithography
由: Vigneswaran, Narayanamurthy
出版: (2017)

Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
由: Norliana, Yusof, et al.
出版: (2021)

Design and Simulation of a MEMS-based Piezoelectric Power Generator
由: Baring, Tania Tracy
出版: (2011)

Design and Simulation of a MEMS-based Piezoelectric Power Generator
由: Tania, Tracy anak Baring, Tania Tracy
出版: (2011)