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Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study

In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-,...

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Main Authors: Narayanamurthy, Vigneswaran, Lakshminarayanan, Sujatha, Yacin, S. Mohamed, Fahmi, Samsuri
Format: Article
Language:English
Published: World Scientific Publishing Co Pte Ltd 2017
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://umpir.ump.edu.my/id/eprint/16921/1/fkee-2017-Vigneswaran-Design%20optimization1.pdf
http://umpir.ump.edu.my/id/eprint/16921/
http://dx.doi.org/10.1142/S0218126617500955
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spelling my.ump.umpir.169212018-05-16T07:51:40Z http://umpir.ump.edu.my/id/eprint/16921/ Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study Narayanamurthy, Vigneswaran Lakshminarayanan, Sujatha Yacin, S. Mohamed Fahmi, Samsuri TK Electrical engineering. Electronics Nuclear engineering In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-, yy- and zz-axes. The design features a proof mass with interdigitated fingers along each side. These interdigitated fingers act as parallel plate capacitors. Due to acceleration, capacitance changes along the comb drive. This change in capacitance can be used to monitor the acceleration. Analysis has been carried out with different comb width designs. Using the MEMS CAD tool CoventorWare, the structure has been designed, simulated and analyzed. The process flow for the fabrication has also been proposed for the above structure. Comparative study with several designs has been made and the efficient design parameters to be considered while designing MEMS accelerometer were proposed. Based on the study, a set of optimized design parameters for the comb accelerometer were reported. World Scientific Publishing Co Pte Ltd 2017 Article PeerReviewed application/pdf en http://umpir.ump.edu.my/id/eprint/16921/1/fkee-2017-Vigneswaran-Design%20optimization1.pdf Narayanamurthy, Vigneswaran and Lakshminarayanan, Sujatha and Yacin, S. Mohamed and Fahmi, Samsuri (2017) Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study. Journal of Circuits, Systems and Computers, 26 (6). pp. 1-10. ISSN 0218-1266 (print); 1793-6454 (online) http://dx.doi.org/10.1142/S0218126617500955 doi: 10.1142/S0218126617500955
institution Universiti Malaysia Pahang
building UMP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Pahang
content_source UMP Institutional Repository
url_provider http://umpir.ump.edu.my/
language English
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Narayanamurthy, Vigneswaran
Lakshminarayanan, Sujatha
Yacin, S. Mohamed
Fahmi, Samsuri
Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
description In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-, yy- and zz-axes. The design features a proof mass with interdigitated fingers along each side. These interdigitated fingers act as parallel plate capacitors. Due to acceleration, capacitance changes along the comb drive. This change in capacitance can be used to monitor the acceleration. Analysis has been carried out with different comb width designs. Using the MEMS CAD tool CoventorWare, the structure has been designed, simulated and analyzed. The process flow for the fabrication has also been proposed for the above structure. Comparative study with several designs has been made and the efficient design parameters to be considered while designing MEMS accelerometer were proposed. Based on the study, a set of optimized design parameters for the comb accelerometer were reported.
format Article
author Narayanamurthy, Vigneswaran
Lakshminarayanan, Sujatha
Yacin, S. Mohamed
Fahmi, Samsuri
author_facet Narayanamurthy, Vigneswaran
Lakshminarayanan, Sujatha
Yacin, S. Mohamed
Fahmi, Samsuri
author_sort Narayanamurthy, Vigneswaran
title Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_short Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_full Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_fullStr Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_full_unstemmed Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_sort design optimization and analysis of proof mass actuation for mems accelerometer: a simulation study
publisher World Scientific Publishing Co Pte Ltd
publishDate 2017
url http://umpir.ump.edu.my/id/eprint/16921/1/fkee-2017-Vigneswaran-Design%20optimization1.pdf
http://umpir.ump.edu.my/id/eprint/16921/
http://dx.doi.org/10.1142/S0218126617500955
_version_ 1643668044213387264
score 13.211869

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