Structural and optical properties of the nc-Si:H thin films irradiated by high energetic ion beams
Hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited by radio-frequency plasma enhanced chemical vapour deposition was irradiated by an energetic ion beam source from a 3.3 kJ Mather type dense plasma focus device. The effects of the energetic ion beam irradiations on the structural a...
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Main Authors: | Goh, Boon Tong, Ngoi, Siew Kien, Yap, S.L., Wong, C.S., Dee, Chang Fu, Rahman, Saadah Abdul |
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Format: | Article |
Published: |
2013
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Online Access: | http://eprints.um.edu.my/7377/ |
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