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On-chip hotplate for temperature control of CMOS SAW resonators

Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistor...

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Main Authors: Nordin, Anis Nurashikin, Voiculescu, Ioana, Zaghloul, Mona E.
Format: Conference or Workshop Item
Language:English
Published: 2008
Subjects:
TK7885 Computer engineering
Online Access:http://irep.iium.edu.my/3717/1/20.pdf
http://irep.iium.edu.my/3717/
http://documents.irevues.inist.fr/bitstream/handle/2042/16862/dtip08071.pdf?sequence=1
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spelling my.iium.irep.37172011-10-27T04:24:10Z http://irep.iium.edu.my/3717/ On-chip hotplate for temperature control of CMOS SAW resonators Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. TK7885 Computer engineering Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistors as a method of temperature control for CMOS SAW resonators. The design employs the oven control temperature stabilization scheme where the devicepsilas temperature is elevated to higher than Tmax to maintain constant device temperature. The efficiency of the polysilicon resistor as a heating element was verified through a 1-D partial differential equation model, 3-D CoventorWarereg finite element simulations and measurements using Compixreg thermal camera. To verify that the on-chip hotplate is effective as a temperature control method, both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/degC has been reduced to -23.19 ppm/degC when heated to 56degC. 2008-04-09 Conference or Workshop Item REM application/pdf en http://irep.iium.edu.my/3717/1/20.pdf Nordin, Anis Nurashikin and Voiculescu, Ioana and Zaghloul, Mona E. (2008) On-chip hotplate for temperature control of CMOS SAW resonators. In: Design, Test, Integration and Packaging of MEMS/MOEMS, 2008, April 9-11, 2008, Nice, French Riviera, France. http://documents.irevues.inist.fr/bitstream/handle/2042/16862/dtip08071.pdf?sequence=1
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TK7885 Computer engineering
spellingShingle TK7885 Computer engineering
Nordin, Anis Nurashikin
Voiculescu, Ioana
Zaghloul, Mona E.
On-chip hotplate for temperature control of CMOS SAW resonators
description Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistors as a method of temperature control for CMOS SAW resonators. The design employs the oven control temperature stabilization scheme where the devicepsilas temperature is elevated to higher than Tmax to maintain constant device temperature. The efficiency of the polysilicon resistor as a heating element was verified through a 1-D partial differential equation model, 3-D CoventorWarereg finite element simulations and measurements using Compixreg thermal camera. To verify that the on-chip hotplate is effective as a temperature control method, both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/degC has been reduced to -23.19 ppm/degC when heated to 56degC.
format Conference or Workshop Item
author Nordin, Anis Nurashikin
Voiculescu, Ioana
Zaghloul, Mona E.
author_facet Nordin, Anis Nurashikin
Voiculescu, Ioana
Zaghloul, Mona E.
author_sort Nordin, Anis Nurashikin
title On-chip hotplate for temperature control of CMOS SAW resonators
title_short On-chip hotplate for temperature control of CMOS SAW resonators
title_full On-chip hotplate for temperature control of CMOS SAW resonators
title_fullStr On-chip hotplate for temperature control of CMOS SAW resonators
title_full_unstemmed On-chip hotplate for temperature control of CMOS SAW resonators
title_sort on-chip hotplate for temperature control of cmos saw resonators
publishDate 2008
url http://irep.iium.edu.my/3717/1/20.pdf
http://irep.iium.edu.my/3717/
http://documents.irevues.inist.fr/bitstream/handle/2042/16862/dtip08071.pdf?sequence=1
_version_ 1643605198558461952
score 13.211869

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