On-chip hotplate for temperature control of CMOS SAW resonators
Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistor...
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Main Authors: | , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2008
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Subjects: | |
Online Access: | http://irep.iium.edu.my/3717/1/20.pdf http://irep.iium.edu.my/3717/ http://documents.irevues.inist.fr/bitstream/handle/2042/16862/dtip08071.pdf?sequence=1 |
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