On-chip hotplate for temperature control of CMOS SAW resonators

Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistor...

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Bibliographic Details
Main Authors: Nordin, Anis Nurashikin, Voiculescu, Ioana, Zaghloul, Mona E.
Format: Conference or Workshop Item
Language:English
Published: 2008
Subjects:
Online Access:http://irep.iium.edu.my/3717/1/20.pdf
http://irep.iium.edu.my/3717/
http://documents.irevues.inist.fr/bitstream/handle/2042/16862/dtip08071.pdf?sequence=1
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