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Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method

This article presents the optimization of a MEMS-based piezoresistive accelerometer sensor using design of experiment (DOE) approach. Two structures of accelerometers, which consist of a proof mass suspended by eight beams, have been investigated. Response surface method (RSM) was employed to op...

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Main Authors: Norliana, Yusof, Badariah, Bais, Norhayati, Soin, Burhanuddin Yeop, Majlis
Format: Conference or Workshop Item
Language:English
English
English
Published: 2021
Subjects:
T Technology (General)
TT Handicrafts Arts and crafts
Online Access:http://eprints.unisza.edu.my/4264/1/FH03-FRIT-21-55630.pdf
http://eprints.unisza.edu.my/4264/2/FH03-FRIT-21-55631.pdf
http://eprints.unisza.edu.my/4264/3/FH03-FRIT-21-56579.pdf
http://eprints.unisza.edu.my/4264/
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spelling my-unisza-ir.42642022-01-02T04:29:20Z http://eprints.unisza.edu.my/4264/ Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method Norliana, Yusof Badariah, Bais Norhayati, Soin Burhanuddin Yeop, Majlis T Technology (General) TT Handicrafts Arts and crafts This article presents the optimization of a MEMS-based piezoresistive accelerometer sensor using design of experiment (DOE) approach. Two structures of accelerometers, which consist of a proof mass suspended by eight beams, have been investigated. Response surface method (RSM) was employed to optimize the geometric beam parameters (thickness, width and length) in order to obtain high sensitivity with an appropriate resonant frequency that satisfies the design requirements for airbag application. The beam thickness, beam width, and beam length were optimized to achieve 0-400Hz bandwidth with high sensitivity. By implementing RSM, the best combination of the three parameters for structure 1 was thickness, = 23 µm, width, = 210 µm, and length, = 800 µm. On the other hand, the best combination of the three parameters for structure 2 was thickness, = 20 µm, width, = 300 µm, and length, = 800 µm. As a result, by using optimized beam parameters, the mechanical sensitivity of the MEMS accelerometer sensor was increased by almost 34.7% and 22.1% for structure 1 and structure 2, respectively. The optimization results showed that the predicted beam parameters of MEMS accelerometer managed to achieve the target specifications for airbag application. Hence, the approach can be successfully applied in improving performance of MEMS-based devices. 2021 Conference or Workshop Item PeerReviewed text en http://eprints.unisza.edu.my/4264/1/FH03-FRIT-21-55630.pdf text en http://eprints.unisza.edu.my/4264/2/FH03-FRIT-21-55631.pdf text en http://eprints.unisza.edu.my/4264/3/FH03-FRIT-21-56579.pdf Norliana, Yusof and Badariah, Bais and Norhayati, Soin and Burhanuddin Yeop, Majlis (2021) Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method. In: IEEE Regional Symposium on Micro and Nanoelectronics 2021, 02-04 Aug 2021, Virtual Conference.
institution Universiti Sultan Zainal Abidin
building UNISZA Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Sultan Zainal Abidin
content_source UNISZA Institutional Repository
url_provider https://eprints.unisza.edu.my/
language English
English
English
topic T Technology (General)
TT Handicrafts Arts and crafts
spellingShingle T Technology (General)
TT Handicrafts Arts and crafts
Norliana, Yusof
Badariah, Bais
Norhayati, Soin
Burhanuddin Yeop, Majlis
Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
description This article presents the optimization of a MEMS-based piezoresistive accelerometer sensor using design of experiment (DOE) approach. Two structures of accelerometers, which consist of a proof mass suspended by eight beams, have been investigated. Response surface method (RSM) was employed to optimize the geometric beam parameters (thickness, width and length) in order to obtain high sensitivity with an appropriate resonant frequency that satisfies the design requirements for airbag application. The beam thickness, beam width, and beam length were optimized to achieve 0-400Hz bandwidth with high sensitivity. By implementing RSM, the best combination of the three parameters for structure 1 was thickness, = 23 µm, width, = 210 µm, and length, = 800 µm. On the other hand, the best combination of the three parameters for structure 2 was thickness, = 20 µm, width, = 300 µm, and length, = 800 µm. As a result, by using optimized beam parameters, the mechanical sensitivity of the MEMS accelerometer sensor was increased by almost 34.7% and 22.1% for structure 1 and structure 2, respectively. The optimization results showed that the predicted beam parameters of MEMS accelerometer managed to achieve the target specifications for airbag application. Hence, the approach can be successfully applied in improving performance of MEMS-based devices.
format Conference or Workshop Item
author Norliana, Yusof
Badariah, Bais
Norhayati, Soin
Burhanuddin Yeop, Majlis
author_facet Norliana, Yusof
Badariah, Bais
Norhayati, Soin
Burhanuddin Yeop, Majlis
author_sort Norliana, Yusof
title Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
title_short Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
title_full Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
title_fullStr Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
title_full_unstemmed Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
title_sort beam parameters optimization of mems piezoresistive accelerometer by using response surface method
publishDate 2021
url http://eprints.unisza.edu.my/4264/1/FH03-FRIT-21-55630.pdf
http://eprints.unisza.edu.my/4264/2/FH03-FRIT-21-55631.pdf
http://eprints.unisza.edu.my/4264/3/FH03-FRIT-21-56579.pdf
http://eprints.unisza.edu.my/4264/
_version_ 1720984500869005312
score 13.211869

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