CHARACTERIZATION OF A CMOS-MEMS DEVICE FOR THE DETECTION OF WEAK VIBRATION

The paper review about the usage of the integration between Complementary Metal Oxide System and Micromechanical system (CMOS-MEMS device) for the detection of weak vibration. The available CMOS-MEMS device at Universiti Teknologi PETRONAS is the device that has high resonance frequency which is 6.1...

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主要作者: ABDUL RASHID, DANIAL HAFIZ
格式: Final Year Project
語言:English
出版: 2017
在線閱讀:http://utpedia.utp.edu.my/id/eprint/19100/1/Final%20Dissertation%20Danial%20Hafiz%2019139.pdf
http://utpedia.utp.edu.my/id/eprint/19100/
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