Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of...
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| 主要な著者: | , , , |
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| フォーマット: | Conference or Workshop Item |
| 出版事項: |
2011
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| 主題: | |
| オンライン･アクセス: | http://ieeexplore.ieee.org http://eprints.utp.edu.my/6966/ |
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