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Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator

Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of...

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Main Authors:	Ahmed, Abdelaziz Yousif, Dennis, John Ojur, Md Khir, M Haris, Mohamad Saad, Mohamad Naufal
Format:	Conference or Workshop Item
Published:	2011
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://ieeexplore.ieee.org http://eprints.utp.edu.my/6966/
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id	my.utp.eprints.6966
record_format	eprints
spelling	my.utp.eprints.69662014-03-31T12:56:16Z Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator Ahmed, Abdelaziz Yousif Dennis, John Ojur Md Khir, M Haris Mohamad Saad, Mohamad Naufal TK Electrical engineering. Electronics Nuclear engineering Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator. The theoretical resonant frequency is found to be 20.1 kHz. The change in the resonant frequency Δf = 0.13 Hz when the mass changes by Δm =43.2 fg on the resonator platform.The sensitivity is theoretical calculated to be0.3 Hz/pg. 2011-10-27 Conference or Workshop Item PeerReviewed http://ieeexplore.ieee.org Ahmed, Abdelaziz Yousif and Dennis, John Ojur and Md Khir, M Haris and Mohamad Saad, Mohamad Naufal (2011) Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator. In: NPC 2011, 19 - 20 September 2011, UTP. http://eprints.utp.edu.my/6966/
institution	Universiti Teknologi Petronas
building	UTP Resource Centre
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Teknologi Petronas
content_source	UTP Institutional Repository
url_provider	http://eprints.utp.edu.my/
topic	TK Electrical engineering. Electronics Nuclear engineering
spellingShingle	TK Electrical engineering. Electronics Nuclear engineering Ahmed, Abdelaziz Yousif Dennis, John Ojur Md Khir, M Haris Mohamad Saad, Mohamad Naufal Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
description	Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator. The theoretical resonant frequency is found to be 20.1 kHz. The change in the resonant frequency Δf = 0.13 Hz when the mass changes by Δm =43.2 fg on the resonator platform.The sensitivity is theoretical calculated to be0.3 Hz/pg.
format	Conference or Workshop Item
author	Ahmed, Abdelaziz Yousif Dennis, John Ojur Md Khir, M Haris Mohamad Saad, Mohamad Naufal
author_facet	Ahmed, Abdelaziz Yousif Dennis, John Ojur Md Khir, M Haris Mohamad Saad, Mohamad Naufal
author_sort	Ahmed, Abdelaziz Yousif
title	Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
title_short	Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
title_full	Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
title_fullStr	Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
title_full_unstemmed	Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
title_sort	analytical modeling of mass-sensitive gas sensor based on mems resonator
publishDate	2011
url	http://ieeexplore.ieee.org http://eprints.utp.edu.my/6966/
_version_	1738655534621392896
score	13.211869

Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator

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