Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator
Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://ieeexplore.ieee.org http://eprints.utp.edu.my/6966/ |
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