Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Published: |
2009
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| Subjects: | |
| Online Access: | http://eprints.utp.edu.my/310/1/paper.pdf http://www.scopus.com/inward/record.url?eid=2-s2.0-70349197961&partnerID=40&md5=99899e06df2bfb210270767d70196294 http://eprints.utp.edu.my/310/ |
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