Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication...
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2009
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my.utp.eprints.3102017-01-19T08:25:38Z Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever Dennis , John Ojur Talha , W.A. Hamid , N.H.B. TK Electrical engineering. Electronics Nuclear engineering The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication technology and bulk micromachining in CoventorWare simulation environment. Analytical models describing 3-D cantilever vibration modes that are actuated by the Lorentz force and their verification by simulation is discussed. Results show that the resonant frequencies for mode 1 and 2 increase with increasing thickness of the cantilever while it is independent of the thickness for mode 3. On the other hand the resonant frequency for mode 3 increases with increasing width of the cantilever while it is independent of width for mode 1 and 2. It is also observed that the displacement of the cantilever for identical applied Lorentz force is highest, indicated highest sensitivity, for mode 1 and lowest for mode 3. ©EDA Publishing/DTIP 2009. 2009 Conference or Workshop Item NonPeerReviewed application/pdf http://eprints.utp.edu.my/310/1/paper.pdf http://www.scopus.com/inward/record.url?eid=2-s2.0-70349197961&partnerID=40&md5=99899e06df2bfb210270767d70196294 Dennis , John Ojur and Talha , W.A. and Hamid , N.H.B. (2009) Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever. In: 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009, 1 April 2009 through 3 April 2009, Rome. http://eprints.utp.edu.my/310/ |
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TK Electrical engineering. Electronics Nuclear engineering Dennis , John Ojur Talha , W.A. Hamid , N.H.B. Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever |
| description |
The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication technology and bulk micromachining in CoventorWare simulation environment. Analytical models describing 3-D cantilever vibration modes that are actuated by the Lorentz force and their verification by simulation is discussed. Results show that the resonant frequencies for mode 1 and 2 increase with increasing thickness of the cantilever while it is independent of the thickness for mode 3. On the other hand the resonant frequency for mode 3 increases with increasing width of the cantilever while it is independent of width for mode 1 and 2. It is also observed that the displacement of the cantilever for identical applied Lorentz force is highest, indicated highest sensitivity, for mode 1 and lowest for mode 3. ©EDA Publishing/DTIP 2009.
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| format |
Conference or Workshop Item |
| author |
Dennis , John Ojur Talha , W.A. Hamid , N.H.B. |
| author_facet |
Dennis , John Ojur Talha , W.A. Hamid , N.H.B. |
| author_sort |
Dennis , John Ojur |
| title |
Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
|
| title_short |
Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
|
| title_full |
Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
|
| title_fullStr |
Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
|
| title_full_unstemmed |
Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever
|
| title_sort |
characterization and modeling of 3-d vibration modes of a micromachined u-shaped cantilever |
| publishDate |
2009 |
| url |
http://eprints.utp.edu.my/310/1/paper.pdf http://www.scopus.com/inward/record.url?eid=2-s2.0-70349197961&partnerID=40&md5=99899e06df2bfb210270767d70196294 http://eprints.utp.edu.my/310/ |
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1738655051958714368 |
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13.211869 |