A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors
This paper presents a monolithic, low-noise capacitive readout interface circuit for CMOS-MEMS resonator based gravimetric chemical gas sensors. In these sensor devices, where the sense capacitances are usually very weak, the readout interface circuit plays a crucial role in determining the overall...
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| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2015
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84962581641&doi=10.1109%2fAFRCON.2015.7332004&partnerID=40&md5=5f22f8b5a414cdb5f8e684858a39d655 http://eprints.utp.edu.my/26189/ |
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