Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic
This study investigated the workability of a NiCr wire probe diagnostic under low temperature plasma operating conditions. The aim of the work was to design and fabricate a triple Langmuir probe with NiCr alloy for measurements in low temperature rf plasmas. The spatial distribution of electron temp...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Published: |
Elsevier B.V.
2016
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969939932&doi=10.1016%2fj.measurement.2016.05.047&partnerID=40&md5=3b5456da1ed085674a6242cc0d0adbaf http://eprints.utp.edu.my/25669/ |
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