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Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic

This study investigated the workability of a NiCr wire probe diagnostic under low temperature plasma operating conditions. The aim of the work was to design and fabricate a triple Langmuir probe with NiCr alloy for measurements in low temperature rf plasmas. The spatial distribution of electron temp...

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Main Authors: Naz, M.Y., Shukrullah, S., Sulaiman, S.A., Najeeb-Ur-Rehman,, Khan, Y., Ghaffar, A., Ullah, S.
Format: Article
Published: Elsevier B.V. 2016
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969939932&doi=10.1016%2fj.measurement.2016.05.047&partnerID=40&md5=3b5456da1ed085674a6242cc0d0adbaf
http://eprints.utp.edu.my/25669/
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spelling my.utp.eprints.256692021-08-27T09:39:34Z Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic Naz, M.Y. Shukrullah, S. Sulaiman, S.A. Najeeb-Ur-Rehman, Khan, Y. Ghaffar, A. Ullah, S. This study investigated the workability of a NiCr wire probe diagnostic under low temperature plasma operating conditions. The aim of the work was to design and fabricate a triple Langmuir probe with NiCr alloy for measurements in low temperature rf plasmas. The spatial distribution of electron temperature and number density were evaluated at different filling pressures in the range of 0.2-0.4 mbar and rf powers in the range of 200-400 W. The probe data revealed a linear increase in temperature and electron number density with rf power along the chamber centerline, whereas an inverse relationship was found between the given plasma parameters and filling gas pressure. The spatial distribution measurements showed a decreasing trend in plasma parameters at positions away from the chamber centerline. The probe I-V characteristics curve revealed a change in polarity of probe potential with an increase in current supply from the plasma discharge to the probe. Initially, the potential difference raised from highly negative values to zero volt, thereafter started increasing positively. It is found that the response of NiCr alloy as probe material was appreciably good under the proposed operating conditions. © 2016 Elsevier Ltd. All rights reserved. Elsevier B.V. 2016 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969939932&doi=10.1016%2fj.measurement.2016.05.047&partnerID=40&md5=3b5456da1ed085674a6242cc0d0adbaf Naz, M.Y. and Shukrullah, S. and Sulaiman, S.A. and Najeeb-Ur-Rehman, and Khan, Y. and Ghaffar, A. and Ullah, S. (2016) Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic. Measurement: Journal of the International Measurement Confederation, 91 . pp. 194-200. http://eprints.utp.edu.my/25669/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
description This study investigated the workability of a NiCr wire probe diagnostic under low temperature plasma operating conditions. The aim of the work was to design and fabricate a triple Langmuir probe with NiCr alloy for measurements in low temperature rf plasmas. The spatial distribution of electron temperature and number density were evaluated at different filling pressures in the range of 0.2-0.4 mbar and rf powers in the range of 200-400 W. The probe data revealed a linear increase in temperature and electron number density with rf power along the chamber centerline, whereas an inverse relationship was found between the given plasma parameters and filling gas pressure. The spatial distribution measurements showed a decreasing trend in plasma parameters at positions away from the chamber centerline. The probe I-V characteristics curve revealed a change in polarity of probe potential with an increase in current supply from the plasma discharge to the probe. Initially, the potential difference raised from highly negative values to zero volt, thereafter started increasing positively. It is found that the response of NiCr alloy as probe material was appreciably good under the proposed operating conditions. © 2016 Elsevier Ltd. All rights reserved.
format Article
author Naz, M.Y.
Shukrullah, S.
Sulaiman, S.A.
Najeeb-Ur-Rehman,
Khan, Y.
Ghaffar, A.
Ullah, S.
spellingShingle Naz, M.Y.
Shukrullah, S.
Sulaiman, S.A.
Najeeb-Ur-Rehman,
Khan, Y.
Ghaffar, A.
Ullah, S.
Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic
author_facet Naz, M.Y.
Shukrullah, S.
Sulaiman, S.A.
Najeeb-Ur-Rehman,
Khan, Y.
Ghaffar, A.
Ullah, S.
author_sort Naz, M.Y.
title Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic
title_short Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic
title_full Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic
title_fullStr Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic
title_full_unstemmed Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic
title_sort investigations on spatial distribution of low temperature plasma parameters using nicr wire probe diagnostic
publisher Elsevier B.V.
publishDate 2016
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969939932&doi=10.1016%2fj.measurement.2016.05.047&partnerID=40&md5=3b5456da1ed085674a6242cc0d0adbaf
http://eprints.utp.edu.my/25669/
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score 13.211869

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