Controlled defect on multilayer graphene surface by oxygen plasma
The study pertaining defect fabrication of graphene has gained interest nowadays. To date, the fabrication of the defect using reactive ion etching on the oxygen flow rate has not been adequately studied. In this work, fabrication defect on multilayer graphene using reactive ion etching at 30 sccm a...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/97020/1/SuhailaIsaak2017_ControlledDefectOnMultilayerGrapheneSurface.pdf http://eprints.utm.my/id/eprint/97020/ http://dx.doi.org/10.1063/1.4968370 |
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