Convolutional neural network for imbalanced data classification of silicon wafer defects
Integrated circuit chip fabrication may induce defects on silicon wafers due to inadequate manufacturing environment, equipment malfunctioning and operational flaws. An identification and analysis of these defects facilitates the process engineering by backtracking and addressing their causes of gen...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2020
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/92436/ http://dx.doi.org/10.1109/CSPA48992.2020.9068669 |
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