Oversampling based on data augmentation in convolutional neural network for silicon wafer defect classification

Silicon wafer defect data collected from fabrication facilities is intrinsically imbalanced because of the variable frequencies of defect types. Frequently occurring types will have more influence on the classification predictions if a model gets trained on such skewed data. A fair classifier for su...

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Bibliographic Details
Main Authors: Batool, Uzma, Shapiai, Mohd. Ibrahim, Ismail, Nordinah, Fauzi, Hilman, Salleh, Syahrizal
Format: Conference or Workshop Item
Published: 2020
Subjects:
Online Access:http://eprints.utm.my/id/eprint/92785/
http://dx.doi.org/10.3233/FAIA200547
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