The effect of depth on fabrication of nanopore using one-step focused ion beam milling for DNA sequencing application
We report the effect of depth on fabrication of nanopore on silicon substrate by utilizing one-step focused ion beam (FIB) milling. The conical shaped of nanopores were successfully fabricated by optimizing the milling parameters of FIB system. The milling depth, base diameter and tip diameter of th...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Published: |
2020
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/92244/ http://dx.doi.org/10.1109/ICSE49846.2020.9166877 |
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