Nitrogen oxide gas sensor based on metal oxide thin film
Indium tin oxide (ITO) thin films of different thicknesses are grown on the corning glass substrates using radio frequency (RF) magnetron sputtering. The variation in resistance of deposited thin films relative to nitrogen oxide (NO2) at different operating temperatures is measured. The sensitivity...
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| Main Authors: | , , , , , |
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| 格式: | Article |
| 出版: |
American Scientific Publishers
2018
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| 主题: | |
| 在线阅读: | http://eprints.utm.my/id/eprint/85762/ http://dx.doi.org/10.1166/jctn.2018.7202 |
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