Nitrogen oxide gas sensor based on metal oxide thin film

Indium tin oxide (ITO) thin films of different thicknesses are grown on the corning glass substrates using radio frequency (RF) magnetron sputtering. The variation in resistance of deposited thin films relative to nitrogen oxide (NO2) at different operating temperatures is measured. The sensitivity...

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主要な著者: Mubin, M. Helmi, Chaudhary, Kashif Tufail, Haider, Zuhaib, Dabagh, Shadab, Aziz, M. Safwan, Ali, Jalil
フォーマット: 論文
出版事項: American Scientific Publishers 2018
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オンライン・アクセス:http://eprints.utm.my/id/eprint/85762/
http://dx.doi.org/10.1166/jctn.2018.7202
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