Cover Image

Nitrogen oxide gas sensor based on metal oxide thin film

Indium tin oxide (ITO) thin films of different thicknesses are grown on the corning glass substrates using radio frequency (RF) magnetron sputtering. The variation in resistance of deposited thin films relative to nitrogen oxide (NO2) at different operating temperatures is measured. The sensitivity...

Full description

Saved in:
Bibliographic Details
Main Authors: Mubin, M. Helmi, Chaudhary, Kashif Tufail, Haider, Zuhaib, Dabagh, Shadab, Aziz, M. Safwan, Ali, Jalil
Format: Article
Published: American Scientific Publishers 2018
Subjects:
QC Physics
Online Access:http://eprints.utm.my/id/eprint/85762/
http://dx.doi.org/10.1166/jctn.2018.7202
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.utm.85762
record_format eprints
spelling my.utm.857622020-07-28T02:45:20Z http://eprints.utm.my/id/eprint/85762/ Nitrogen oxide gas sensor based on metal oxide thin film Mubin, M. Helmi Chaudhary, Kashif Tufail Haider, Zuhaib Dabagh, Shadab Aziz, M. Safwan Ali, Jalil QC Physics Indium tin oxide (ITO) thin films of different thicknesses are grown on the corning glass substrates using radio frequency (RF) magnetron sputtering. The variation in resistance of deposited thin films relative to nitrogen oxide (NO2) at different operating temperatures is measured. The sensitivity of grown thin films as NO2 sensor is investigated in single layer and sensory array configurations. The high sensitivity is observed for thin film with thickness 227 nm is 1.440 as single layer configuration and 2.065 as series array combination of thin films with thickness 132 nm +424 nm. The response time, reproducibility and recovery time are determined relative to NO2 gas sensing behavior of the fabricated film. The response and recovery times determined for single layer configuration are 108 and 240 seconds respectively whereas for array configuration are 60 and 600 seconds respectively. A very stable reproducibility response towards NO2 gas sensing is observed. American Scientific Publishers 2018 Article PeerReviewed Mubin, M. Helmi and Chaudhary, Kashif Tufail and Haider, Zuhaib and Dabagh, Shadab and Aziz, M. Safwan and Ali, Jalil (2018) Nitrogen oxide gas sensor based on metal oxide thin film. Journal of Computational and Theoretical Nanoscience, 15 (3). pp. 1059-1063. ISSN 1546-1955 http://dx.doi.org/10.1166/jctn.2018.7202
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
topic QC Physics
spellingShingle QC Physics
Mubin, M. Helmi
Chaudhary, Kashif Tufail
Haider, Zuhaib
Dabagh, Shadab
Aziz, M. Safwan
Ali, Jalil
Nitrogen oxide gas sensor based on metal oxide thin film
description Indium tin oxide (ITO) thin films of different thicknesses are grown on the corning glass substrates using radio frequency (RF) magnetron sputtering. The variation in resistance of deposited thin films relative to nitrogen oxide (NO2) at different operating temperatures is measured. The sensitivity of grown thin films as NO2 sensor is investigated in single layer and sensory array configurations. The high sensitivity is observed for thin film with thickness 227 nm is 1.440 as single layer configuration and 2.065 as series array combination of thin films with thickness 132 nm +424 nm. The response time, reproducibility and recovery time are determined relative to NO2 gas sensing behavior of the fabricated film. The response and recovery times determined for single layer configuration are 108 and 240 seconds respectively whereas for array configuration are 60 and 600 seconds respectively. A very stable reproducibility response towards NO2 gas sensing is observed.
format Article
author Mubin, M. Helmi
Chaudhary, Kashif Tufail
Haider, Zuhaib
Dabagh, Shadab
Aziz, M. Safwan
Ali, Jalil
author_facet Mubin, M. Helmi
Chaudhary, Kashif Tufail
Haider, Zuhaib
Dabagh, Shadab
Aziz, M. Safwan
Ali, Jalil
author_sort Mubin, M. Helmi
title Nitrogen oxide gas sensor based on metal oxide thin film
title_short Nitrogen oxide gas sensor based on metal oxide thin film
title_full Nitrogen oxide gas sensor based on metal oxide thin film
title_fullStr Nitrogen oxide gas sensor based on metal oxide thin film
title_full_unstemmed Nitrogen oxide gas sensor based on metal oxide thin film
title_sort nitrogen oxide gas sensor based on metal oxide thin film
publisher American Scientific Publishers
publishDate 2018
url http://eprints.utm.my/id/eprint/85762/
http://dx.doi.org/10.1166/jctn.2018.7202
_version_ 1674066204147318784
score 13.211869

Similar Items