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High fidelity simulation models for equipment performance prediction in semiconductor industry

Semiconductor manufacturing is a high-technology industry which is capital intensive and operationally complex with its process technology refreshed every two years. Precision in capacity planning is critical to ensure the right amount of capital equipment is purchased to match the demand while meet...

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Main Author: Vali Mohamed, Anwar Ali
Format: Thesis
Language:English
Published: 2014
Subjects:
T Technology (General)
Online Access:http://eprints.utm.my/id/eprint/78114/1/AnwarAliValiPRS20141.pdf
http://eprints.utm.my/id/eprint/78114/
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spelling my.utm.781142018-07-25T08:17:34Z http://eprints.utm.my/id/eprint/78114/ High fidelity simulation models for equipment performance prediction in semiconductor industry Vali Mohamed, Anwar Ali T Technology (General) Semiconductor manufacturing is a high-technology industry which is capital intensive and operationally complex with its process technology refreshed every two years. Precision in capacity planning is critical to ensure the right amount of capital equipment is purchased to match the demand while meeting aggressive cost and operational targets. The key input parameter for capacity calculations is the equipment output rate. As equipment get more complex, its output rate become difficult to predict using spreadsheets, thus the need for detailed dynamic equipment simulation models. However, literature on how to build detailed equipment simulation models for real-world is scarce. Practitioners do not share their experience openly due to proprietary reasons. This dissertation investigates the complexity of semiconductor manufacturing which makes its capacity planning difficult. The techniques to build, verify and validate high fidelity equipment simulation models were developed. The models are then used to augment capacity planning and productivity improvement decision making. Case studies are conducted using the models to improve capacity forecast planning accuracy for capital purchase decisions which resulted in million dollars capital avoidance, test equipment productivity improvement ideas and decide which ones have benefits to pursue, and determine the effect of different operator manning ratios for manufacturing execution decisions. The results show that raw model accuracy can be up to 99% using the methods described here. For manufacturing execution, model accuracy can be up to 95% due to variability in human performance, but good enough to provide insights on manning ratio strategies. The case studies demonstrate how the results directly contribute to company performance in terms of capital efficiency, capital expenditure avoidance, and waste reduction. It enables optimal equipment configuration decisions to be made upfront during technology development. It also earns credibility and senior management confidence in using such simulation models for decision making. 2014-04 Thesis NonPeerReviewed application/pdf en http://eprints.utm.my/id/eprint/78114/1/AnwarAliValiPRS20141.pdf Vali Mohamed, Anwar Ali (2014) High fidelity simulation models for equipment performance prediction in semiconductor industry. PhD thesis, Universiti Teknologi Malaysia, Razak School of Engineering and Advanced Technology. http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:82452
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
language English
topic T Technology (General)
spellingShingle T Technology (General)
Vali Mohamed, Anwar Ali
High fidelity simulation models for equipment performance prediction in semiconductor industry
description Semiconductor manufacturing is a high-technology industry which is capital intensive and operationally complex with its process technology refreshed every two years. Precision in capacity planning is critical to ensure the right amount of capital equipment is purchased to match the demand while meeting aggressive cost and operational targets. The key input parameter for capacity calculations is the equipment output rate. As equipment get more complex, its output rate become difficult to predict using spreadsheets, thus the need for detailed dynamic equipment simulation models. However, literature on how to build detailed equipment simulation models for real-world is scarce. Practitioners do not share their experience openly due to proprietary reasons. This dissertation investigates the complexity of semiconductor manufacturing which makes its capacity planning difficult. The techniques to build, verify and validate high fidelity equipment simulation models were developed. The models are then used to augment capacity planning and productivity improvement decision making. Case studies are conducted using the models to improve capacity forecast planning accuracy for capital purchase decisions which resulted in million dollars capital avoidance, test equipment productivity improvement ideas and decide which ones have benefits to pursue, and determine the effect of different operator manning ratios for manufacturing execution decisions. The results show that raw model accuracy can be up to 99% using the methods described here. For manufacturing execution, model accuracy can be up to 95% due to variability in human performance, but good enough to provide insights on manning ratio strategies. The case studies demonstrate how the results directly contribute to company performance in terms of capital efficiency, capital expenditure avoidance, and waste reduction. It enables optimal equipment configuration decisions to be made upfront during technology development. It also earns credibility and senior management confidence in using such simulation models for decision making.
format Thesis
author Vali Mohamed, Anwar Ali
author_facet Vali Mohamed, Anwar Ali
author_sort Vali Mohamed, Anwar Ali
title High fidelity simulation models for equipment performance prediction in semiconductor industry
title_short High fidelity simulation models for equipment performance prediction in semiconductor industry
title_full High fidelity simulation models for equipment performance prediction in semiconductor industry
title_fullStr High fidelity simulation models for equipment performance prediction in semiconductor industry
title_full_unstemmed High fidelity simulation models for equipment performance prediction in semiconductor industry
title_sort high fidelity simulation models for equipment performance prediction in semiconductor industry
publishDate 2014
url http://eprints.utm.my/id/eprint/78114/1/AnwarAliValiPRS20141.pdf
http://eprints.utm.my/id/eprint/78114/
http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:82452
_version_ 1643657731904634880
score 13.211869

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