High fidelity simulation models for equipment performance prediction in semiconductor industry
Semiconductor manufacturing is a high-technology industry which is capital intensive and operationally complex with its process technology refreshed every two years. Precision in capacity planning is critical to ensure the right amount of capital equipment is purchased to match the demand while meet...
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| Format: | Thesis |
| Language: | English |
| Published: |
2014
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| Online Access: | http://eprints.utm.my/id/eprint/78114/1/AnwarAliValiPRS20141.pdf http://eprints.utm.my/id/eprint/78114/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:82452 |
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