Comparison of deposition methods of ZnO thin film on flexible substrate
This paper reports the effect of the different deposition methods towards the ZnO nanostructure crystal quality and film thickness on the polyimide substrate. The ZnO film has been deposited by using the spray pyrolysis technique, sol-gel and RF Sputtering. Different methods give a different nanostr...
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Main Authors: | Idris, A. A. M., Arsat, R., Ahmad, M. K., Sidek, F. |
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Format: | Article |
Language: | English |
Published: |
Institute of Advanced Engineering and Science
2017
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/74889/1/AAMIdris_ComparisonofDepositionMethodsofZnO.pdf http://eprints.utm.my/id/eprint/74889/ https://www.scopus.com/inward/record.uri?eid=2-s2.0-85016979197&doi=10.11591%2fijeecs.v5.i3.pp536-541&partnerID=40&md5=aefcbba272ec844a8c8a83610c472423 |
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