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Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique

Semiconducting copper oxide (CuO) thin films have been deposited using DC sputtering technique using copper (Cu) target for detection of oxidizing nitrogen dioxide (NO2) gas. A series of CuO thin films (gas sensors) (C1-C7) of various thicknesses had been prepared on Corning glass substrate. The tim...

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書目詳細資料
主要作者:	Mohd. Sukri, Nurul Ain
格式:	Thesis
語言:	English
出版:	2014
主題:	QC Physics
在線閱讀:	http://eprints.utm.my/id/eprint/48933/25/NurulAinMohdShukriMFS2014.pdf http://eprints.utm.my/id/eprint/48933/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:85264
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