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Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique

Semiconducting copper oxide (CuO) thin films have been deposited using DC sputtering technique using copper (Cu) target for detection of oxidizing nitrogen dioxide (NO2) gas. A series of CuO thin films (gas sensors) (C1-C7) of various thicknesses had been prepared on Corning glass substrate. The tim...

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Main Author: Mohd. Sukri, Nurul Ain
Format: Thesis
Language:English
Published: 2014
Subjects:
QC Physics
Online Access:http://eprints.utm.my/id/eprint/48933/25/NurulAinMohdShukriMFS2014.pdf
http://eprints.utm.my/id/eprint/48933/
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spelling my.utm.489332020-07-08T02:46:35Z http://eprints.utm.my/id/eprint/48933/ Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique Mohd. Sukri, Nurul Ain QC Physics Semiconducting copper oxide (CuO) thin films have been deposited using DC sputtering technique using copper (Cu) target for detection of oxidizing nitrogen dioxide (NO2) gas. A series of CuO thin films (gas sensors) (C1-C7) of various thicknesses had been prepared on Corning glass substrate. The time of deposition was between 90 to 270 minutes at 30-minutes time interval. The thickness of the gas sensors was measured using a surface profiler (Dektak 3) and found to be in the range between 159 nm to 604 nm. The resistance and the gas sensing properties to NO2, mainly the sensitivity, response and recovery time were investigated using the gas sensor characterization system (GSCS) for a single gas sensor and for an array of sensors in series configurations at different operating temperatures. The resistance of the gas sensor decreased when exposed to NO2 gas. The best sensitivity (0.859) for the single gas sensor configuration was found to be sensor C3 which was deposited at 150 minutes, corresponding to 247 nm thickness. While, for the sensor array configuration, the best sensitivity (0.788) was found to be sensor AC3 at the combination of 90 and 150 minutes-deposition time. The response time for the gas sensor C3 was 57 seconds and the recovery time was 60 seconds; whereas for the array gas sensor AC3, the response and recovery time were 45 seconds and 60 seconds, respectively. Thus, the single configuration had a better sensitivity and response time compared to the array configuration. Hence, the single configuration was the preferable gas sensor for NO2 gas. 2014-05 Thesis NonPeerReviewed application/pdf en http://eprints.utm.my/id/eprint/48933/25/NurulAinMohdShukriMFS2014.pdf Mohd. Sukri, Nurul Ain (2014) Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique. Masters thesis, Universiti Teknologi Malaysia, Faculty of Science. http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:85264
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
language English
topic QC Physics
spellingShingle QC Physics
Mohd. Sukri, Nurul Ain
Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique
description Semiconducting copper oxide (CuO) thin films have been deposited using DC sputtering technique using copper (Cu) target for detection of oxidizing nitrogen dioxide (NO2) gas. A series of CuO thin films (gas sensors) (C1-C7) of various thicknesses had been prepared on Corning glass substrate. The time of deposition was between 90 to 270 minutes at 30-minutes time interval. The thickness of the gas sensors was measured using a surface profiler (Dektak 3) and found to be in the range between 159 nm to 604 nm. The resistance and the gas sensing properties to NO2, mainly the sensitivity, response and recovery time were investigated using the gas sensor characterization system (GSCS) for a single gas sensor and for an array of sensors in series configurations at different operating temperatures. The resistance of the gas sensor decreased when exposed to NO2 gas. The best sensitivity (0.859) for the single gas sensor configuration was found to be sensor C3 which was deposited at 150 minutes, corresponding to 247 nm thickness. While, for the sensor array configuration, the best sensitivity (0.788) was found to be sensor AC3 at the combination of 90 and 150 minutes-deposition time. The response time for the gas sensor C3 was 57 seconds and the recovery time was 60 seconds; whereas for the array gas sensor AC3, the response and recovery time were 45 seconds and 60 seconds, respectively. Thus, the single configuration had a better sensitivity and response time compared to the array configuration. Hence, the single configuration was the preferable gas sensor for NO2 gas.
format Thesis
author Mohd. Sukri, Nurul Ain
author_facet Mohd. Sukri, Nurul Ain
author_sort Mohd. Sukri, Nurul Ain
title Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique
title_short Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique
title_full Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique
title_fullStr Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique
title_full_unstemmed Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique
title_sort nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique
publishDate 2014
url http://eprints.utm.my/id/eprint/48933/25/NurulAinMohdShukriMFS2014.pdf
http://eprints.utm.my/id/eprint/48933/
http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:85264
_version_ 1674066136714444800
score 13.211869

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