Basic characteristics of a multilayer thin electrostatic actuator supported by lubricating oil for a fine-motion stage
The present paper describes the basic characteristics of a multilayer thin electrostatic actuator supported by lubricating oil rather than precise ball bearings for a fine-motion stage. The purpose of the present research is to realize an easy-to-maintain multilayer thin electrostatic actuator havi...
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2012
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/6453/1/1st_Journal_PE.pdf http://eprints.utem.edu.my/id/eprint/6453/ |
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