Various doping concentration effect on silicon on insulator (SOI) phase modulator
This paper reports the effect of doping concentration to the electrical characteristic performance of the phase modulator in the carrier injection mode at wavelength 1.55μm. The phase modulator device has been integrated in the silicon-on-insulator (SOI) rib waveguide with the p-i-n diode structure....
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Main Authors: | , , , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2010
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Subjects: | |
Online Access: | http://eprints.utem.edu.my/id/eprint/15164/1/Various%20doping%20concentration%20effect%20on%20silicon%20on%20insulator%20%28SOI%29%20phase%20modulator235.pdf http://eprints.utem.edu.my/id/eprint/15164/ |
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