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Modeling of TiN coating thickness using RSM approach

In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process va...

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Main Authors: Mohamad Jaya, Abdul Syukor, Mohd Hashim, Siti Zaiton, Haron, Habibollah, Muhamad, Mohd Razali, Hasan Basari, Abd Samad, Abd. Rahman, Md. Nizam
Format: Article
Language:English
Published: Trans tech Publication, Switzerland 2014
Online Access:http://eprints.utem.edu.my/id/eprint/14194/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf
http://eprints.utem.edu.my/id/eprint/14194/
https://www.scientific.net/KEM.594-595.556
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spelling my.utem.eprints.141942023-06-08T10:37:44Z http://eprints.utem.edu.my/id/eprint/14194/ Modeling of TiN coating thickness using RSM approach Mohamad Jaya, Abdul Syukor Mohd Hashim, Siti Zaiton Haron, Habibollah Muhamad, Mohd Razali Hasan Basari, Abd Samad Abd. Rahman, Md. Nizam In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process variables while the coating thickness as output response. The coating thickness as an important coating characteristic was measured using surface profilometer equipment. Analysis of variance (ANOVA) was used to determine the significant factors influencing TiN coating thickness. Then, a polynomial linear model represented the process variables and coating thickness was developed. The result indicated that the actual validation data fell within the 90% prediction interval (PI) and the percentage of the residual errors were low. Findings from this study suggested that Argon pressure, N2 pressure and turntable speed influenced the TiN coating thickness. Trans tech Publication, Switzerland 2014 Article PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/14194/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf Mohamad Jaya, Abdul Syukor and Mohd Hashim, Siti Zaiton and Haron, Habibollah and Muhamad, Mohd Razali and Hasan Basari, Abd Samad and Abd. Rahman, Md. Nizam (2014) Modeling of TiN coating thickness using RSM approach. Key Engineering Materials, 594 (595). pp. 556-560. ISSN 1662-9795 https://www.scientific.net/KEM.594-595.556 10.4028/www.scientific.net/KEM.594-595.556
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
description In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process variables while the coating thickness as output response. The coating thickness as an important coating characteristic was measured using surface profilometer equipment. Analysis of variance (ANOVA) was used to determine the significant factors influencing TiN coating thickness. Then, a polynomial linear model represented the process variables and coating thickness was developed. The result indicated that the actual validation data fell within the 90% prediction interval (PI) and the percentage of the residual errors were low. Findings from this study suggested that Argon pressure, N2 pressure and turntable speed influenced the TiN coating thickness.
format Article
author Mohamad Jaya, Abdul Syukor
Mohd Hashim, Siti Zaiton
Haron, Habibollah
Muhamad, Mohd Razali
Hasan Basari, Abd Samad
Abd. Rahman, Md. Nizam
spellingShingle Mohamad Jaya, Abdul Syukor
Mohd Hashim, Siti Zaiton
Haron, Habibollah
Muhamad, Mohd Razali
Hasan Basari, Abd Samad
Abd. Rahman, Md. Nizam
Modeling of TiN coating thickness using RSM approach
author_facet Mohamad Jaya, Abdul Syukor
Mohd Hashim, Siti Zaiton
Haron, Habibollah
Muhamad, Mohd Razali
Hasan Basari, Abd Samad
Abd. Rahman, Md. Nizam
author_sort Mohamad Jaya, Abdul Syukor
title Modeling of TiN coating thickness using RSM approach
title_short Modeling of TiN coating thickness using RSM approach
title_full Modeling of TiN coating thickness using RSM approach
title_fullStr Modeling of TiN coating thickness using RSM approach
title_full_unstemmed Modeling of TiN coating thickness using RSM approach
title_sort modeling of tin coating thickness using rsm approach
publisher Trans tech Publication, Switzerland
publishDate 2014
url http://eprints.utem.edu.my/id/eprint/14194/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf
http://eprints.utem.edu.my/id/eprint/14194/
https://www.scientific.net/KEM.594-595.556
_version_ 1769847380381794304
score 13.211869

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