Predictive Modeling of TiN Coating Roughness
In this paper, an approach in modeling surface roughness of Titanium Nitrite (TiN) coating using Response Surface Method (RSM) is implemented. The TiN coatings were formed using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as pro...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publication, Switzerland
2013
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/10670/1/Predictive_Modeling_of_TiN_Coating_Roughness.pdf http://eprints.utem.edu.my/id/eprint/10670/ http://www.ttp.net |
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