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Modeling of TiN Coating Thickness Using RSM Approach

In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process variab...

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Main Authors:	Mohamad Jaya, Abdul Syukor, Mohd Hashim, Siti Zaiton, Haron, Habibollah, Muhamad, Muhd. Razali, Hasan Basari, Abd Samad, Abd. Rahman, Md. Nizam
Format:	Article
Language:	English
Published:	Trans tech Publication, Switzerland 2014
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://eprints.utem.edu.my/id/eprint/10673/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf http://eprints.utem.edu.my/id/eprint/10673/
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spelling	my.utem.eprints.106732015-05-28T04:12:43Z http://eprints.utem.edu.my/id/eprint/10673/ Modeling of TiN Coating Thickness Using RSM Approach Mohamad Jaya, Abdul Syukor Mohd Hashim, Siti Zaiton Haron, Habibollah Muhamad, Muhd. Razali Hasan Basari, Abd Samad Abd. Rahman, Md. Nizam TJ Mechanical engineering and machinery In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process variables while the coating thickness as output response. The coating thickness as an important coating characteristic was measured using surface profilometer equipment. Analysis of variance (ANOVA) was used to determine the significant factors influencing TiN coating thickness. Then, a polynomial linear model represented the process variables and coating thickness was developed. The result indicated that the actual validation data fell within the 90% prediction interval(PI) and the percentage of the residual errors were low. Findings from this study suggested that Argon pressure, N2 pressure and turntable speed influenced the TiN coating thickness Trans tech Publication, Switzerland 2014 Article PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/10673/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf Mohamad Jaya, Abdul Syukor and Mohd Hashim, Siti Zaiton and Haron, Habibollah and Muhamad, Muhd. Razali and Hasan Basari, Abd Samad and Abd. Rahman, Md. Nizam (2014) Modeling of TiN Coating Thickness Using RSM Approach. Key Engineering Materials, 594-59 (2014). pp. 556-560. ISSN 1662-9795 10.4028/www.scientific.net/KEM.594-595.556
institution	Universiti Teknikal Malaysia Melaka
building	UTEM Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Teknikal Malaysia Melaka
content_source	UTEM Institutional Repository
url_provider	http://eprints.utem.edu.my/
language	English
topic	TJ Mechanical engineering and machinery
spellingShingle	TJ Mechanical engineering and machinery Mohamad Jaya, Abdul Syukor Mohd Hashim, Siti Zaiton Haron, Habibollah Muhamad, Muhd. Razali Hasan Basari, Abd Samad Abd. Rahman, Md. Nizam Modeling of TiN Coating Thickness Using RSM Approach
description	In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process variables while the coating thickness as output response. The coating thickness as an important coating characteristic was measured using surface profilometer equipment. Analysis of variance (ANOVA) was used to determine the significant factors influencing TiN coating thickness. Then, a polynomial linear model represented the process variables and coating thickness was developed. The result indicated that the actual validation data fell within the 90% prediction interval(PI) and the percentage of the residual errors were low. Findings from this study suggested that Argon pressure, N2 pressure and turntable speed influenced the TiN coating thickness
format	Article
author	Mohamad Jaya, Abdul Syukor Mohd Hashim, Siti Zaiton Haron, Habibollah Muhamad, Muhd. Razali Hasan Basari, Abd Samad Abd. Rahman, Md. Nizam
author_facet	Mohamad Jaya, Abdul Syukor Mohd Hashim, Siti Zaiton Haron, Habibollah Muhamad, Muhd. Razali Hasan Basari, Abd Samad Abd. Rahman, Md. Nizam
author_sort	Mohamad Jaya, Abdul Syukor
title	Modeling of TiN Coating Thickness Using RSM Approach
title_short	Modeling of TiN Coating Thickness Using RSM Approach
title_full	Modeling of TiN Coating Thickness Using RSM Approach
title_fullStr	Modeling of TiN Coating Thickness Using RSM Approach
title_full_unstemmed	Modeling of TiN Coating Thickness Using RSM Approach
title_sort	modeling of tin coating thickness using rsm approach
publisher	Trans tech Publication, Switzerland
publishDate	2014
url	http://eprints.utem.edu.my/id/eprint/10673/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf http://eprints.utem.edu.my/id/eprint/10673/
_version_	1665905431001694208
score	13.211869

Modeling of TiN Coating Thickness Using RSM Approach

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