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Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film

Calcium copper titanate (CCTO) thin film with high dielectric permittivity (ε), low tangent loss (tan δ) and have high temperature phase stability up to 300 °C is very importance for several advanced microelectronic applications. The electrical and optical properties are depended on the structural a...

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Main Author: Cheah, Wei Kian
Format: Monograph
Language:English
Published: Universiti Sains Malaysia 2017
Subjects:
T Technology
TA401-492 Materials of engineering and construction. Mechanics of materials
Online Access:http://eprints.usm.my/52441/1/Effect%20Of%20Deposition%20Temperature%20And%20Type%20Of%20Substrates%20On%20Structural%2C%20Surface%20Morphology%20And%20Optical%20Properties%20Of%20Rf%20Magnetron%20Sputtered%20Ccto%20Thin%20Film_Cheah%20Wei%20Kian_B1_2017.pdf
http://eprints.usm.my/52441/
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spelling my.usm.eprints.52441 http://eprints.usm.my/52441/ Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film Cheah, Wei Kian T Technology TA401-492 Materials of engineering and construction. Mechanics of materials Calcium copper titanate (CCTO) thin film with high dielectric permittivity (ε), low tangent loss (tan δ) and have high temperature phase stability up to 300 °C is very importance for several advanced microelectronic applications. The electrical and optical properties are depended on the structural and surface morphology of CCTO thin film. This project aims to study effect of deposition temperature and type of substrates (ITO, FTO and glass) on the structural, surface morphology and optical properties of sputtered CCTO thin film. Firstly, CCTO thin films were deposited on different type of substrates (ITO, FTO and glass) at deposition temperatures of 100, 150, 200 and 250 °C by RF magnetron sputtering in Argon atmosphere. The structural, surface morphology and optical properties of the deposited CCTO thin film have been studied by X-ray diffraction (XRD), atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDX) and ultraviolet-visible (UV-vis) spectrophotometer. XRD analysis showed CCTO thin films on ITO and FTO substrates have a highest intensity peak at (022) while CCTO thin film on glass substrates showed almost amorphous in structure. Besides, crystallinity of CCTO thin film on ITO and FTO increased with increase of deposition temperature. FESEM only able to reveal the crystallite size of CCTO thin film on ITO substrates and the crystallite size is increased with increase of deposition temperature. AFM analysis showed the blank FTO substrates with 6 times rougher than blank ITO and glass substrates caused the CCTO thin film on it have significant higher in surface roughness and pore size. This is due to CCTO thin film are highly dependent on the surface feature of substrate. Increase of deposition temperature have increased the surface roughness (Ra) and pore size respectively. In addition, Tauc plot method was used to estimate the optical energy band gap of the deposited CCTO thin film. Optical energy band gap of the CCTO were decreased from 3.50 eV to 3.14 eV (ITO), 3.52 eV to 3.10 eV (FTO) and 3.58 eV to 3.10 eV (glass) as deposition temperature increased from 100 °C to 250 °C. Therefore, favourable CCTO thin film properties can be possibly obtained for particular application by controlling deposition temperature and using different type of substrates. Universiti Sains Malaysia 2017-06-01 Monograph NonPeerReviewed application/pdf en http://eprints.usm.my/52441/1/Effect%20Of%20Deposition%20Temperature%20And%20Type%20Of%20Substrates%20On%20Structural%2C%20Surface%20Morphology%20And%20Optical%20Properties%20Of%20Rf%20Magnetron%20Sputtered%20Ccto%20Thin%20Film_Cheah%20Wei%20Kian_B1_2017.pdf Cheah, Wei Kian (2017) Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film. Project Report. Universiti Sains Malaysia, Pusat Pengajian Kejuruteraan Bahan Sumber Mineral. (Submitted)
institution Universiti Sains Malaysia
building Hamzah Sendut Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Sains Malaysia
content_source USM Institutional Repository
url_provider http://eprints.usm.my/
language English
topic T Technology
TA401-492 Materials of engineering and construction. Mechanics of materials
spellingShingle T Technology
TA401-492 Materials of engineering and construction. Mechanics of materials
Cheah, Wei Kian
Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film
description Calcium copper titanate (CCTO) thin film with high dielectric permittivity (ε), low tangent loss (tan δ) and have high temperature phase stability up to 300 °C is very importance for several advanced microelectronic applications. The electrical and optical properties are depended on the structural and surface morphology of CCTO thin film. This project aims to study effect of deposition temperature and type of substrates (ITO, FTO and glass) on the structural, surface morphology and optical properties of sputtered CCTO thin film. Firstly, CCTO thin films were deposited on different type of substrates (ITO, FTO and glass) at deposition temperatures of 100, 150, 200 and 250 °C by RF magnetron sputtering in Argon atmosphere. The structural, surface morphology and optical properties of the deposited CCTO thin film have been studied by X-ray diffraction (XRD), atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDX) and ultraviolet-visible (UV-vis) spectrophotometer. XRD analysis showed CCTO thin films on ITO and FTO substrates have a highest intensity peak at (022) while CCTO thin film on glass substrates showed almost amorphous in structure. Besides, crystallinity of CCTO thin film on ITO and FTO increased with increase of deposition temperature. FESEM only able to reveal the crystallite size of CCTO thin film on ITO substrates and the crystallite size is increased with increase of deposition temperature. AFM analysis showed the blank FTO substrates with 6 times rougher than blank ITO and glass substrates caused the CCTO thin film on it have significant higher in surface roughness and pore size. This is due to CCTO thin film are highly dependent on the surface feature of substrate. Increase of deposition temperature have increased the surface roughness (Ra) and pore size respectively. In addition, Tauc plot method was used to estimate the optical energy band gap of the deposited CCTO thin film. Optical energy band gap of the CCTO were decreased from 3.50 eV to 3.14 eV (ITO), 3.52 eV to 3.10 eV (FTO) and 3.58 eV to 3.10 eV (glass) as deposition temperature increased from 100 °C to 250 °C. Therefore, favourable CCTO thin film properties can be possibly obtained for particular application by controlling deposition temperature and using different type of substrates.
format Monograph
author Cheah, Wei Kian
author_facet Cheah, Wei Kian
author_sort Cheah, Wei Kian
title Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film
title_short Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film
title_full Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film
title_fullStr Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film
title_full_unstemmed Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film
title_sort effect of deposition temperature and type of substrates on structural, surface morphology and optical properties of rf magnetron sputtered ccto thin film
publisher Universiti Sains Malaysia
publishDate 2017
url http://eprints.usm.my/52441/1/Effect%20Of%20Deposition%20Temperature%20And%20Type%20Of%20Substrates%20On%20Structural%2C%20Surface%20Morphology%20And%20Optical%20Properties%20Of%20Rf%20Magnetron%20Sputtered%20Ccto%20Thin%20Film_Cheah%20Wei%20Kian_B1_2017.pdf
http://eprints.usm.my/52441/
_version_ 1732946309997920256
score 13.211869

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