Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates
The aim of this project is to study the growth and characterization of nanocrystalline indium nitride (InN) on silicon (Si) substrates by means of various non-contact and non-destructive characterization tools. These include the scanning electron microscopy (SEM), energy dispersive X-ray (EDX)...
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my.usm.eprints.43801 http://eprints.usm.my/43801/ Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates Amirhoseiny, Maryam QC1 Physics (General) The aim of this project is to study the growth and characterization of nanocrystalline indium nitride (InN) on silicon (Si) substrates by means of various non-contact and non-destructive characterization tools. These include the scanning electron microscopy (SEM), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM), and X-ray diffraction (XRD) for structural characterization, and Fourier transform infrared (FTIR) spectroscopy, micro-Raman spectroscopy, and photoluminescence (PL) spectroscopy for optical characterization. Initial works on the structural and optical characterization of the nanocrystalline InN grown on anisotropic (110) orientation of sillicon (Si) substrates have been carried out. Studies are, however, focused on optimizing the deposition conditions for growing nanocrystalline InN by radio frequency (RF) sputtering method. All deposited films obtained under different deposition conditions were slightly nitrogen-rich, but increasing the RF power provided more InN compounds in stoichiometric form. XRD results revealed wurtzite nanocrystalline InN films with a (101) preferred growth orientation for all deposited films. The strong PL peak was observed in the energy of 1.9 eV at room temperature. This higher value of the bandgap is due to the Moss–Burstein shift effect. 2013-09 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/43801/1/Maryam%20Amirhoseiny24.pdf Amirhoseiny, Maryam (2013) Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates. PhD thesis, Universiti Sains Malaysia. |
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QC1 Physics (General) Amirhoseiny, Maryam Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates |
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The aim of this project is to study the growth and characterization of
nanocrystalline indium nitride (InN) on silicon (Si) substrates by means of various
non-contact and non-destructive characterization tools. These include the scanning
electron microscopy (SEM), energy dispersive X-ray (EDX) analysis, atomic force
microscopy (AFM), and X-ray diffraction (XRD) for structural characterization, and
Fourier transform infrared (FTIR) spectroscopy, micro-Raman spectroscopy, and
photoluminescence (PL) spectroscopy for optical characterization.
Initial works on the structural and optical characterization of the
nanocrystalline InN grown on anisotropic (110) orientation of sillicon (Si) substrates
have been carried out. Studies are, however, focused on optimizing the deposition
conditions for growing nanocrystalline InN by radio frequency (RF) sputtering
method. All deposited films obtained under different deposition conditions were
slightly nitrogen-rich, but increasing the RF power provided more InN compounds in
stoichiometric form. XRD results revealed wurtzite nanocrystalline InN films with a
(101) preferred growth orientation for all deposited films. The strong PL peak was
observed in the energy of 1.9 eV at room temperature. This higher value of the
bandgap is due to the Moss–Burstein shift effect. |
format |
Thesis |
author |
Amirhoseiny, Maryam |
author_facet |
Amirhoseiny, Maryam |
author_sort |
Amirhoseiny, Maryam |
title |
Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates |
title_short |
Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates |
title_full |
Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates |
title_fullStr |
Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates |
title_full_unstemmed |
Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates |
title_sort |
structural and optical properties of sputtered nanocrystalline indium nitride on silicon substrates |
publishDate |
2013 |
url |
http://eprints.usm.my/43801/1/Maryam%20Amirhoseiny24.pdf http://eprints.usm.my/43801/ |
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13.211869 |