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Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications

In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube g...

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Main Authors: Lee, Mai Woon, Md Razib, Nadia, Teh, Aun Shih, Bien, Daniel Chia Sheng, Chen, Soo Kien, Abdullah @ Ab. Aziz, Shahrul Azam
Format: Conference or Workshop Item
Language:English
Published: IEEE 2012
Online Access:http://psasir.upm.edu.my/id/eprint/45174/1/Effect%20of%20Co%20catalyst%20on%20PECVD%20growth%20of%20carbon%20nanotubes%20for%20NEMS%20applications.pdf
http://psasir.upm.edu.my/id/eprint/45174/
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spelling my.upm.eprints.451742020-08-04T02:42:51Z http://psasir.upm.edu.my/id/eprint/45174/ Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications Lee, Mai Woon Md Razib, Nadia Teh, Aun Shih Bien, Daniel Chia Sheng Chen, Soo Kien Abdullah @ Ab. Aziz, Shahrul Azam In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube growth duration of 20 minutes, growth was only achieved with thinner catalyst layers but when the growth duration was doubled, high density of CNTS were also observed with thicker catalyst layers with taller nanotubes formed. The nucleation of the catalyst with various thicknesses was also studied as the absorption of the carbon feedstock is dependent on the initial size of the catalyst island. IEEE 2012 Conference or Workshop Item PeerReviewed text en http://psasir.upm.edu.my/id/eprint/45174/1/Effect%20of%20Co%20catalyst%20on%20PECVD%20growth%20of%20carbon%20nanotubes%20for%20NEMS%20applications.pdf Lee, Mai Woon and Md Razib, Nadia and Teh, Aun Shih and Bien, Daniel Chia Sheng and Chen, Soo Kien and Abdullah @ Ab. Aziz, Shahrul Azam (2012) Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications. In: 10th IEEE International Conference on Semiconductor Electronics (ICSE 2012), 19-21 Sept. 2012, Grand Millenium Hotel, Kuala Lumpur. (pp. 14-17). 10.1109/SMElec.2012.6417080
institution Universiti Putra Malaysia
building UPM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Putra Malaysia
content_source UPM Institutional Repository
url_provider http://psasir.upm.edu.my/
language English
description In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube growth duration of 20 minutes, growth was only achieved with thinner catalyst layers but when the growth duration was doubled, high density of CNTS were also observed with thicker catalyst layers with taller nanotubes formed. The nucleation of the catalyst with various thicknesses was also studied as the absorption of the carbon feedstock is dependent on the initial size of the catalyst island.
format Conference or Workshop Item
author Lee, Mai Woon
Md Razib, Nadia
Teh, Aun Shih
Bien, Daniel Chia Sheng
Chen, Soo Kien
Abdullah @ Ab. Aziz, Shahrul Azam
spellingShingle Lee, Mai Woon
Md Razib, Nadia
Teh, Aun Shih
Bien, Daniel Chia Sheng
Chen, Soo Kien
Abdullah @ Ab. Aziz, Shahrul Azam
Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
author_facet Lee, Mai Woon
Md Razib, Nadia
Teh, Aun Shih
Bien, Daniel Chia Sheng
Chen, Soo Kien
Abdullah @ Ab. Aziz, Shahrul Azam
author_sort Lee, Mai Woon
title Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
title_short Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
title_full Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
title_fullStr Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
title_full_unstemmed Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
title_sort effect of co catalyst on pecvd growth of carbon nanotubes for nems applications
publisher IEEE
publishDate 2012
url http://psasir.upm.edu.my/id/eprint/45174/1/Effect%20of%20Co%20catalyst%20on%20PECVD%20growth%20of%20carbon%20nanotubes%20for%20NEMS%20applications.pdf
http://psasir.upm.edu.my/id/eprint/45174/
_version_ 1675328727186145280
score 13.222552

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