Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube g...
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| Main Authors: | , , , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2012
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| Online Access: | http://psasir.upm.edu.my/id/eprint/45174/1/Effect%20of%20Co%20catalyst%20on%20PECVD%20growth%20of%20carbon%20nanotubes%20for%20NEMS%20applications.pdf http://psasir.upm.edu.my/id/eprint/45174/ |
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