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Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche applicatio...

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書目詳細資料
Main Authors:	Ralib A.A.M., Nordin A.N., Othman R., Salleh H.
其他作者:	36537608500
格式:	Conference paper
出版:	2023
主題:	Acoustic devices Design Harvesters Open circuit voltage Piezoelectricity Scanning electron microscopy Sensor nodes Sensors Stainless steel Telecommunication equipment X ray diffraction Zinc oxide Acoustic application Acoustic Sensors Acoustic vibration Copper electrodes Electrical power Energy Harvester Experimental measurements Finite element modelling High-frequency sounds MEMS fabrication Microgenerators Monitoring system Niche applications Noise detection Output voltages Piezoelectric thin films Power levels Self-powered Simulation result Stainless steel substrates Vibration frequency Acoustic noise
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