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Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche applicatio...

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Main Authors:	Ralib A.A.M., Nordin A.N., Othman R., Salleh H.
Other Authors:	36537608500
Format:	Conference paper
Published:	2023
Subjects:	Acoustic devices Design Harvesters Open circuit voltage Piezoelectricity Scanning electron microscopy Sensor nodes Sensors Stainless steel Telecommunication equipment X ray diffraction Zinc oxide Acoustic application Acoustic Sensors Acoustic vibration Copper electrodes Electrical power Energy Harvester Experimental measurements Finite element modelling High-frequency sounds MEMS fabrication Microgenerators Monitoring system Niche applications Noise detection Output voltages Piezoelectric thin films Power levels Self-powered Simulation result Stainless steel substrates Vibration frequency Acoustic noise
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id	my.uniten.dspace-30492
record_format	dspace
spelling	my.uniten.dspace-304922023-12-29T15:48:27Z Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications Ralib A.A.M. Nordin A.N. Othman R. Salleh H. 36537608500 7005958999 7003407400 24067645400 Acoustic devices Design Harvesters Open circuit voltage Piezoelectricity Scanning electron microscopy Sensor nodes Sensors Stainless steel Telecommunication equipment X ray diffraction Zinc oxide Acoustic application Acoustic Sensors Acoustic vibration Copper electrodes Electrical power Energy Harvester Experimental measurements Finite element modelling High-frequency sounds MEMS fabrication Microgenerators Monitoring system Niche applications Noise detection Output voltages Piezoelectric thin films Power levels Self-powered Simulation result Stainless steel substrates Vibration frequency Acoustic noise Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche application is aero acoustics, where wasted, high dB and high frequency sound generated by aircrafts are transformed into useful energy. Having selfpowered, miniature acoustic sensors allows noise detection monitoring systems to be self-sustaining. This paper illustrates an Aluminium doped Zinc Oxide (AZO) cantilever beam on stainless steel substrate with a top copper electrode. Design and finite element modelling of the design was conducted using CoventorwareTM. The AZO piezoelectric thin film was RF-sputtered on the stainless steel substrate. Characterizations were performed using X-ray diffraction (XRD) and scanning electron microscopy (SEM) to evaluate the piezoelectric qualities and surface morphology, respectively. Experimental measurements indicate approximately 345.4 mV AC output voltage (open circuit voltage) is produced at vibration frequencies of 30 kHz. This is in accordance with the CoventorwareTM simulation results. This measured power level is sufficient to power a miniature wireless acoustic sensor nodes to monitor noise generated by aircrafts. � Springer-Verlag 2011. Final 2023-12-29T07:48:27Z 2023-12-29T07:48:27Z 2011 Conference paper 10.1007/s00542-011-1228-8 2-s2.0-79958801886 https://www.scopus.com/inward/record.uri?eid=2-s2.0-79958801886&doi=10.1007%2fs00542-011-1228-8&partnerID=40&md5=00b3a99830d9b0193b4e624ebde02026 https://irepository.uniten.edu.my/handle/123456789/30492 17 4 563 573 Scopus
institution	Universiti Tenaga Nasional
building	UNITEN Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Tenaga Nasional
content_source	UNITEN Institutional Repository
url_provider	http://dspace.uniten.edu.my/
topic	Acoustic devices Design Harvesters Open circuit voltage Piezoelectricity Scanning electron microscopy Sensor nodes Sensors Stainless steel Telecommunication equipment X ray diffraction Zinc oxide Acoustic application Acoustic Sensors Acoustic vibration Copper electrodes Electrical power Energy Harvester Experimental measurements Finite element modelling High-frequency sounds MEMS fabrication Microgenerators Monitoring system Niche applications Noise detection Output voltages Piezoelectric thin films Power levels Self-powered Simulation result Stainless steel substrates Vibration frequency Acoustic noise
spellingShingle	Acoustic devices Design Harvesters Open circuit voltage Piezoelectricity Scanning electron microscopy Sensor nodes Sensors Stainless steel Telecommunication equipment X ray diffraction Zinc oxide Acoustic application Acoustic Sensors Acoustic vibration Copper electrodes Electrical power Energy Harvester Experimental measurements Finite element modelling High-frequency sounds MEMS fabrication Microgenerators Monitoring system Niche applications Noise detection Output voltages Piezoelectric thin films Power levels Self-powered Simulation result Stainless steel substrates Vibration frequency Acoustic noise Ralib A.A.M. Nordin A.N. Othman R. Salleh H. Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
description	Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche application is aero acoustics, where wasted, high dB and high frequency sound generated by aircrafts are transformed into useful energy. Having selfpowered, miniature acoustic sensors allows noise detection monitoring systems to be self-sustaining. This paper illustrates an Aluminium doped Zinc Oxide (AZO) cantilever beam on stainless steel substrate with a top copper electrode. Design and finite element modelling of the design was conducted using CoventorwareTM. The AZO piezoelectric thin film was RF-sputtered on the stainless steel substrate. Characterizations were performed using X-ray diffraction (XRD) and scanning electron microscopy (SEM) to evaluate the piezoelectric qualities and surface morphology, respectively. Experimental measurements indicate approximately 345.4 mV AC output voltage (open circuit voltage) is produced at vibration frequencies of 30 kHz. This is in accordance with the CoventorwareTM simulation results. This measured power level is sufficient to power a miniature wireless acoustic sensor nodes to monitor noise generated by aircrafts. � Springer-Verlag 2011.
author2	36537608500
author_facet	36537608500 Ralib A.A.M. Nordin A.N. Othman R. Salleh H.
format	Conference paper
author	Ralib A.A.M. Nordin A.N. Othman R. Salleh H.
author_sort	Ralib A.A.M.
title	Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_short	Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_full	Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_fullStr	Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_full_unstemmed	Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_sort	design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
publishDate	2023
_version_	1806425834966220800
score	13.223943

Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

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