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Polysilicon process development for floating gate memory devices

Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, P...

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Bibliographic Details
Main Authors: Zarimawaty, Zailan, Ramzan, Mat Ayub, Mohd Rosydi, Zakaria
Format: Working Paper
Language:English
Published: Universiti Malaysia Pahang 2010
Subjects:
Polycrystalline silicon
Amorphous silicon
PECVD
Malaysian Technical Universities Conference on Engineering and Technology (MUCEET)
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/8656
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Summary:Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, Pahang, Malaysia.

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