实物特征: A review: Properties of silicon carbide materials in MEMS application

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Main Authors:	Noraini, Marsi, Burhanuddin, Yeop Majlis, Faisal Mohd, Yasin, Hafzaliza Erny, Zainal Abidin, Azrul Azlan, Hamzah
其他作者:	mnoraini@uthm.edu.my
格式:	Article
语言:	English
出版:	Universiti Malaysia Perlis (UniMAP) 2021
主题:	MEMS Silicon carbide High temperature Radiation Sensor
在线阅读:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69528
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实物特征
总结:	Link to publisher's homepage at http://ijneam.unimap.edu.my