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Nano patterning of cone dots and nano constrictions of negative e-beam resist for single electron transistor fabrication

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書誌詳細
主要な著者:	Sutikno, Madnasri, Uda, Hashim, Zul Azhar, Zahid Jamal
フォーマット:	論文
言語:	English
出版事項:	Springer New York 2009
主題:	Transistors Integrated circuits > Design and construction e-beam Lithography, Electron beam Integrated circuits Electron beams Lithography
オンライン･アクセス:	http://dspace.unimap.edu.my/xmlui/handle/123456789/6694
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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