Description: Nano patterning of cone dots and nano constrictions of negative e-beam resist for single electron transistor fabrication

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Bibliographic Details
Main Authors:	Sutikno, Madnasri, Uda, Hashim, Zul Azhar, Zahid Jamal
Format:	Article
Language:	English
Published:	Springer New York 2009
Subjects:	Transistors Integrated circuits > Design and construction e-beam Lithography, Electron beam Integrated circuits Electron beams Lithography
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/6694
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Summary:	Link to publisher's homepage at http://www.springerlink.com