Fabrication and characterization of ultra thin Si0₂ for nano devices: surface morphology and electrical study

Master of Science (Microelectronic Engineering)

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Bibliographic Details
Main Author: Mohd Faiz Aizad, Abdul Fatah
Other Authors: Uda Hashim, Assoc. Prof. Dr.
Format: Thesis
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2019
Subjects:
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/63455
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