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Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication

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書誌詳細
主要な著者:	Balakrishnan, Sharma Rao, Muhammad Nurfaiz, Asri, Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa
その他の著者:	bala.sharmarao@gmail.com
フォーマット:	論文
言語:	English
出版事項:	Trans Tech Publications 2014
主題:	Biosensor Clinical diagnostics Critical dimension Photolithography Photoresist
オンライン･アクセス:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33562
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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