Description: Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication

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Bibliographic Details
Main Authors:	Balakrishnan, Sharma Rao, Muhammad Nurfaiz, Asri, Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa
Other Authors:	bala.sharmarao@gmail.com
Format:	Article
Language:	English
Published:	Trans Tech Publications 2014
Subjects:	Biosensor Clinical diagnostics Critical dimension Photolithography Photoresist
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33562
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Summary:	Link to publisher's homepage at http://www.ttp.net/