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Conventional photolithography and process optimization of pattern- size expansion technique for nanogap biosensor fabrication

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書目詳細資料
Main Authors:	Balakrishnan, Sharma Rao, Muhammad Nurfaiz, Asri, Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa
其他作者:	bala.sharmarao@gmail.com
格式:	Article
語言:	English
出版:	Trans Tech Publications 2014
主題:	Biosensor Clinical diagnostics Critical dimension Photolithography Photoresist
在線閱讀:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33562
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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