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Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique

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Main Authors:	Mohammad Nuzaihan, Md Nor, Uda, Hashim, Prof. Dr., Siti Fatimah, Abdul Rahman, Tijjani Adam, Shuwa
其他作者:	m.nuzaihan@unimap.edu.my
格式:	Article
语言:	English
出版:	Trans Tech Publications 2014
主题:	Electron beam lithography ma-N2400 negative resist Negative pattern scheme Silicon nanowire
在线阅读:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33557
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