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Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor

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Main Authors: Qazi Mohammad, Humayun, Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa
Other Authors: qazihumayun2@gmail.com
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
Capacitance
Chrome mask
Microgap
pH
Photolithography
Sensor
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33531
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spelling my.unimap-335312014-04-08T07:22:25Z Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor Qazi Mohammad, Humayun Uda, Hashim, Prof. Dr. Tijjani Adam, Shuwa qazihumayun2@gmail.com uda@unimap.edu.my tijjaniadam@yahoo.com Capacitance Chrome mask Microgap pH Photolithography Sensor Link to publisher's homepage at http://www.ttp.net/ The article describes the fabrication and characterization of silver microgap sensor on silicon substrate. By employing cheap photolithography process the proposed microgap sensor has been fabricated. The silver microgap sensor was used for pH sensing, by dropping different pH on microgap surface. To obtain the microgap sensor structure by using AutoCAD software, mask was designed. To maintain high accuracy in pattern transfer the AutoCAD design mask was transferred to chrome glass mask. The fabricated silver microgap pH sensor gap spacing was around 03μm. From the electrical data we conclude that when the pH value varies from acidic to basic (pH 1, pH 2 to pH 11, pH 13) the value of capacitance decreased from 33pF to 8pF. The result shows that the silver microgap pH sensor has the ability to differentiate the acidic pH form basic one. The next part of the research is to decrease the microgap spacing until reach to nanosize spacing, so that can easily used for biosensing application. 2014-04-08T07:22:25Z 2014-04-08T07:22:25Z 2014 Article Advanced Materials Research, vol.832, 2014, pages 73-78 1662-8985 http://dspace.unimap.edu.my:80/dspace/handle/123456789/33531 http://www.scientific.net/AMR.832.73 10.4028/www.scientific.net/AMR.832.73 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Capacitance
Chrome mask
Microgap
pH
Photolithography
Sensor
spellingShingle Capacitance
Chrome mask
Microgap
pH
Photolithography
Sensor
Qazi Mohammad, Humayun
Uda, Hashim, Prof. Dr.
Tijjani Adam, Shuwa
Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor
description Link to publisher's homepage at http://www.ttp.net/
author2 qazihumayun2@gmail.com
author_facet qazihumayun2@gmail.com
Qazi Mohammad, Humayun
Uda, Hashim, Prof. Dr.
Tijjani Adam, Shuwa
format Article
author Qazi Mohammad, Humayun
Uda, Hashim, Prof. Dr.
Tijjani Adam, Shuwa
author_sort Qazi Mohammad, Humayun
title Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor
title_short Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor
title_full Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor
title_fullStr Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor
title_full_unstemmed Low cost detection of pH and its effect on the capacitive behavior of micro-gap sensor
title_sort low cost detection of ph and its effect on the capacitive behavior of micro-gap sensor
publisher Trans Tech Publications
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/33531
_version_ 1643797202395463680
score 13.222552

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