Parametric study and thickness evaluation of photoresist development for the formation of microgap electrodes using surface nanoprofiler

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Main Authors: Qazi Mohammad, Humayun, Uda, Hashim, Prof. Dr.
其他作者: uda@unimap.edu.my
格式: Article
语言:English
出版: Scientific.Net 2014
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在线阅读:http://dspace.unimap.edu.my:80/dspace/handle/123456789/32126
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